专利名称：SPATIAL LIGHT MODULATOR WITH HIDDEN
COMB ACTUATOR
发明人：NOVOTNY, VLAD, J.,SHAH, PAREN申请号：US2004007052申请日：20040304
公开号：WO2004086744A3公开日：20050203
摘要：Described are Micro-Electro-Mechanical Systems (MEMS) actuators (100) withhidden combs (fixed combs 120 and movable combs 130) and torsional hinges (115). Eachof the comb actuators have a plurality of teeth, which are fixed (121) or movable (165),respectively. The fixed comb is in a first plane (170) coplanar with the movable comb'ssecond plane (175), wherein the second plane is disposed between the first plane and theactuator members. The described comb actuators provide increased torque, and theactuators are infinitely variable through a range of angles.
申请人：ACTIVE OPTICAL NETWORKS, INC.
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