专利名称：Contact terminal for measurement,
measurement apparatus, probe card set,wafer probe apparatus, and testingapparatus
发明人：Tetsuya Kuitani,Tadao Saito,Shigeru
Matsumura,Shin Sakiyama
申请号：US11438605申请日：20060522
公开号：US20060279304A1公开日：20061214
专利附图：
摘要：A contact terminal for measurement is provided, for transmitting a signalbetween a desired probe pin among a plurality of probe pins arranged in parallel at apredetermined distance in a predetermined direction on the surface of a probe substrateand an external measurement apparatus. The contact terminal for measurement includes:a signal terminal having an width smaller than the distance between the probe pinsprovided on both sides of one probe pin in the arrangement direction; two groundterminals to which a ground potential is applied, which are provided on both sides of thesignal terminal in the arrangement direction and which have each width larger than thatof the signal terminal in the arrangement direction; and a signal line electricallyconnecting the signal terminal to a signal input terminal of the external measurementapparatus.
申请人：Tetsuya Kuitani,Tadao Saito,Shigeru Matsumura,Shin Sakiyama
地址：Tokyo JP,Tokyo JP,Tokyo JP,Tokyo JP
国籍：JP,JP,JP,JP
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