专利名称:Method for forming an optical component发明人:Kazuhito Shimoda,Junichi Ohsako申请号:US09688541申请日:20001016公开号:US06733821B1公开日:20040511
专利附图:
摘要:A method for forming an optical component includes (i) depositing opticallayers on a base, and (ii) controlling a thickness of a tuning layer by (a) depositing thetuning layer on the optical layers, (b) measuring a first optical characteristic, (c) measuringa second optical characteristic after continued deposition of the tuning layer, (d)
determining whether the second optical characteristic has decreased compared to thefirst optical characteristic, (e) when the second optical characteristic has not decreased,continuing deposition of the tuning layer and returning to steps (ii)(b)-(e), when thesecond optical characteristic has decreased, terminating the depositing and removing aportion of the tuning layer formed during a period of time defined from when anincrease/decrease of the second optical characteristic is stopped to when the secondoptical characteristic is changed to be decreased, and (f) adding a layer of a lowerrefractive index on the tuning layer.
申请人:SONY CORPORATION
代理机构:Sonnenschein, Nath & Rosenthal LLP
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